GE Measurement & Control SolutionsGE Measurement & Control Solutions

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phoenix nanome|x

Ultra High-resolution nanofocus - nanome|x

The phoenix nanome|x is an ultra high-resolution nanofocus X-ray inspection system designed for inspecting high-quality assemblies and interconnections in the semiconductor and SMT industries. The system offers excellent performance and versatility and can be used for 2D X-ray inspection as well as for full 3D computed tomography (nano ct). With the new x|act software package the phoenix nanome|x is the system of choice to ensure meeting actual and future zero defect requirements.

 

 

 

 

 

Features

Key Features

  • Superior dual detector technology (digital image chain and active temperature-stabilized digital detector with 30 fps) for brilliant live images
  • High magnification
  • Precise Manipulation
  • High repeatability
  • 180 kV / 15 W high-power open nanofocus tube with up to 200 nanometer detail detectability
  • Upgradeable to nanoCTÒ
  • Optional:
    • x|act software package for easy and fast CAD based high-resolution automated X-ray inspection (μAXI) for extremely high defect coverage with high magnification and repeatability
    • Brilliant live inspection images due to high dynamic temperature-stabilized digital GE DXR detector with 30 fps (frames per second) and active cooling
    • 3D computed tomography scans within 10 seconds
    • Up to 2 times faster data acquisition at the same high image quality level by diamond|window

Customer Benefits

  • Combined 2D / 3D CT operation
  • Superior dual detector technology (digital image chain and active temperature-stabilized digital detector with 30 fps) for brilliant live images
  • Automation of inspection steps possible
  • Outstanding ease-of-use

Applications

Mounted Printed Circuit Boards

app-nanomex-semiconductor

nanofocus X-ray image of flip- chip solder joints inside a processor case. The image shows one solder bridge and several open solder joints. The solder joint diameter is app. 150 µm. (Learn More)

 

Semiconductor and Other Electronic Components

app-micromex-semiconductor-2

nanoCT® of a µBGA after 4000 temperature stress cycles. Due to a voxelsize of 0.5 microns, cracks with 8 to < 1 micron are detectable. (Learn More)

Accessories

  • CT option: includes software datos|x, high precision rotation unit, reconstruction and visualization workstation
  • quality|review: Repair station software for visualizing and manual review of results from an automatic program run, e.g. bga|module, qfp|module or vc|module.
  • converter:Software package to convert result files, generated by quality|assurance or x|act, into other formats, required by third party software.
  • quality|analyst: Software package for analyzing and visualizing inspection results, which are collected by an automatic program and reviewed with quality|review.
  • diamond|window: up to 2 times faster data acquisition at the same high image quality level
  • 4" Image Intensifier with 4MP Image Chain: This high resolving 4’’ Image Intensifier image chain: with full digital read out and image processing is a basic part for all high quality phoenix|x-ray 2D systems. The detector is suitable for 2D real time inspection.

Specifications

Max. tube voltage 180 kV
Max. output 15 W
Detail detectability Up to 0,2 µm
Min. focus-object-distance 0.3 mm
Max. voxel resolution (depending on object size) < 1 µm 
Geometric magnification (2D) Up to 1970-fold
Geometric magnification (3D) <300-fold
Max. object size (height x diameter) 680 mm x 635 mm / 27" x 25"
Max. object weight 10 kg/ 22 lbs
Image chain 2 megapixel digital image chain
Manipulation 5-axis sample manipulation
2D X-ray imaging yes
3D computed tomography yes (optional)
System size 1860 mm x 2020 mm x 1920 mm / 73.2” x 79.5” x 75.6”
System weight 2600 kg / 5732 lbs
Radiation Safety - Full protective radiation safety cabinet according to the German RöV (attachment 2 nr. 3) and the US Performance Standard 21 CFR 1020.40 (Cabinet X-ray Systems)
- Radiation leakage rate: < 1.0 µSv/h measured 10 cm from cabinet wall

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Descriptions English Deutsch RU Español
Diamond Window Brochure acrobat-reader
Inspection Technologies Brochure acrobat-reader acrobat-reader acrobat-reader acrobat-reader
microme|x DXR-HD Brochure acrobat-reader acrobat-reader
nanomex Brochure acrobat-reader acrobat-reader
Package Brochure acrobat-reader
PCBA Brochure acrobat-reader
x-act Brochure acrobat-reader


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