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XRD 3003 PTS-HR

Residual Stress Analysis

The XRD 3003 PTS is a special 4-circle diffractometer system, which has been designed for performance of Phase, Texture and Residual Stress analysis in one single system. The additional two circles allow general orientation of samples in real space.

 

 

 

 

 

 

 

 

Features

Key Features & Benefits

  • XRD 3003 PTS-configuration with additional topics for high resolution: goniometer: backlash-free min. step size: 0,0001° reproducibility:+/-0,0001°

Applications

  • HR XRD for investigation of single crystalline substrate materials, epitaxial and other thin films, rocking curves, reciprocal space maps (RSM)
  • In-plane GID, GISAXS
  • Reflectometry
  • Customers in semiconductor and optical industry, physics, materials science

Specifications

Two-circle goniometer MZ VI E

Minimum step size 0.0005° (optional 0.0001°)
Reproducibility ±0.0003° (optional ±0.0001°)
Ranges -3° ≤ Ω ≤ 182° and -3° ≤ Θ ≤ 169°

TS-3 goniometer

Max. load 5 kg
Maximum space for sample and attachment 220 mm (width) x 100 mm (depth)
Tilt axis χ - Minimum step size: 0.0005°
- Reproducibility: ±0.0003°
- Range: -90° ≤ χ ≤ +90°
Rotation axis Φ - Minimum step size: 0.002°
- Reproducibility: ±0.001°
- Range: n x 360°
Translation axis Z - Minimum step size: 0.001 mm
- Range: 25 mm
X/Y stage - Minimum step size: 0.01 mm
- Range: 50 mm x 50 mm
- Maximum load: 2.5 kg

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