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XRD 3003 HR double double

High Resolution Diffractometer

The SEIFERT XRD 3003 HR double double is a high resolution diffractometer for the structural characterization of crystalline substrates and thin films. In addition to typical applications like rocking curves, reciprocal space mapping and reflectometry the system can do the “extended Bond technique” to determine highly precise lattice parameters of even non-cubic materials. Operation in both double and triple crystal mode is possible with one experimental set-up. Samples can be perfectly aligned in an easy way by a double-tilt stage mounted to the 150 mm X/Y table.

 

 

 

 

Features

  • Standard Cu Beam Source
  • Multilayer mirror as intensity amplifier
  • Channel-cut monochromator and analyser
  • Eulerian cradle with X, Y, Z, Chi, Phi
  • Scintillation counter
  • Double-tilt stage for sample alignment
  • Full 6 inch wafer mapping
  • Standard X-ray protection cabinet
  • Powerful RayfleX software package

Applications

  • Extended Bond method for high precision determination of lattice constants
  • Rocking curves
  • Reciprocal space mapping
  • Reflectometry
  • No limitations to measure even highly asymmetric reflections, Chi tilt up to 90°
  • Double and triple crystal mode
  • 2-bounce and 4-bounce channel-cut monochromator, Ge220 and Ge440
  • 3 bounce channel cut analyzer

Specifications

XRD 3003 HR Double Double

Safety cabinet Standard X-ray cabinet according to German X-ray law RöV
X-ray equipment 2-60kV, 2-80 mA, max. 3.5 kW, +/- 0.01% at +/-10% mains voltage fluctuation
X-ray tube Cu glass tube line focus
X-ray optics Multilayer mirror and Ge(110) channel cut crystals
Sample manipulator Eulerian cradle with Chi, Phi, X, Y and Z
Detector Scintillation counter

Two-circle goniometer MZ VI E

Axes Theta/Theta
Minimum step size 0.0001°
Reproducibility ± 0.0001°
Omega range -5° to +185°
2Theta range -140° to +154°

Sample Manipulator

Tilt axis Chi
Minimum step size 0.0005°
Reproducibility ± 0.0003°
Range +90°/ -70°
Rotation axis Phi
Minimum step size 0.0005°
Reproducibility: ± 0.0003°
Range n x 360°
Translation axis Z
Minimum step size 0.001mm
Reproducibility: ± 0.005 mm
Range 25 mm
X/ Y stage
Minimum step size 0.001 mm
Reproducibility: ± 0.005 mm
Range 150 mm

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